Pumps for Wafer Dispensing: Underfill, Edge Sealing, MEMS

Processes requiring dispensing directly onto a wafer – such as underfill, edge sealing, masking or Micro Electro-Mechanical Systems (MEMS) applications – are easily handled with our fully automated dispense systems. With a selection of dispense pumps that meet any dispense process requirement, you can handle any current and future processes.

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Example of a Wafer component.
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Wafer Fixturing in Stand-alone System.

For automated processing, we can interface with our wafer handling system to feed wafers, with or without frames, directly from magazines. Wafers without frames may be auto-aligned before presentation to the dispenser. Wafer handling systems may incorporate additional process features such as alignment, preheating, post-cure/bake, cooling, and second magazine. Wafers up to 12″ can be accommodated. In addition, SECS/GEM communication allows for advanced communication with a factory server for loading wafer maps as well as reporting traceability information.

Bulk feeding low viscosity fluids from external reservoirs makes unattended processing easy. Bulk reservoirs can be mounted externally on our automated systems and pressure fed to the dispense pump needed for the process. Reservoirs contain level sensors to notify an operator when fluid level is low. Reservoirs external to the system avoid any possible contamination to the work area during refill.

Our videos demonstrate dispensing adhesive seal (MEMs) to edge seal wafers using our Precision Auger Pump and Volumetric PCD Pump Series . Pump selection is based on fluid properties. The Precision Auger Pump is recommended for thicker and more abrasive fluid dispensing. For low-to-mid viscosities, we recommend the no drip or drool Volumetric PCD Pump Series.

Our fully automated dispense systems have essential features for a successful dispense process such as fiducial alignment, surface sensing on multiple levels, and the ability to program complex patterns that may be recalled as needed. Compatibility with our full range of dispense pumps and the ability to use up to three in a single process make our systems extremely versatile.

We also offer a retrofit kit for the Volumetric PCD Pumps and Precision Auger Pumps so you can integrate the pump into your platform. Retrofit kits come complete with a controller and the necessary interface cables and mounting.

Pumps for Wafer Dispensing Recommendations